Acta Optica Sinica, Volume. 20, Issue 3, 376(2000)

Analysis of Two Errors in Grating Projection Profilometry

[in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    A new conceptimage point displacement (IPD) is presented, on which the principles and key tasks in light pattern projection profilometry are re-interpreted and evaluated. Two non-negligible error sources from phase to IPD and from IPD to height are analyzed in detail. Some compensation approaches are proposed and verified by numerical simulation and experiments.

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    [in Chinese], [in Chinese], [in Chinese]. Analysis of Two Errors in Grating Projection Profilometry[J]. Acta Optica Sinica, 2000, 20(3): 376

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    Paper Information

    Category: Fourier optics and signal processing

    Received: Nov. 12, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

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