Chinese Journal of Lasers, Volume. 40, Issue 12, 1208001(2013)
Analysis and Metrology of Reproducibility of High-Precision Optic Mount
In order to evaluate the reproducibility of the high-precision optic mount, simulations and tests are undertaken. The model of the optic mount is built in ANSYS, and the residual stress in the mount and the deformation of the mirrors due to disturbance are analyzed, then the reproducibility root mean square (RMS) error of the optic mount is calculated. Calculation results indicate that based on the mount design and assembly accuracy, the reproducibility RMS that the optic mount achieves is better than 0.14 nm. The reproducibility metrology is carried out on the high repeatability interferometer device, and the result indicates that the reproducibility RMS of the optic mount device is better than 0.18 nm, which is in accord with the simulation, and meets the requirement of the reproducibility error budget.
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Wang Hui, Zhou Feng, Wang Liping, Yu Jie, Jin Chunshui. Analysis and Metrology of Reproducibility of High-Precision Optic Mount[J]. Chinese Journal of Lasers, 2013, 40(12): 1208001
Category: measurement and metrology
Received: Jul. 2, 2013
Accepted: --
Published Online: Oct. 20, 2013
The Author Email: Hui Wang (wangh-19850322@163.com)