Laser & Optoelectronics Progress, Volume. 57, Issue 5, 053003(2020)

Micro-Ultraviolet Spectrometer Analysis System

Liangkun Huang1,2、*, Quan Wen1,2、**, Zhiyu Wen1,2, Fan Yu1,2, Haitao Liu2, Mingjian Hong2, and Yingke Xie1,2
Author Affiliations
  • 1Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China
  • 2Microsystem Research Center, Chongqing University, Chongqing 400044, China
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    In this study, a micro-ultraviolet spectrometer with an IV-type optical system is designed, fabricated, and analyzed. The micro-ultraviolet spectrometer is effectively validated for online real-time analysis applications. The main parameters of the prototype include a wavelength range of 200-400 nm, resolution of 0.31 nm, wavelength accuracy of ±0.1 nm, and a signal-to-noise ratio of 507∶1. The experimental results of a 12-h system stability test suggest that the spectral fluctuation is less than 0.47%, confirming the long-term stability of the spectrometer. Finally, the performance of the spectrometer is verified by measuring SO2 gas at 25 ℃. Based on the theory of differential absorption spectroscopy, a differential absorption cross section calculation of a standard gas is performed. The test results show that the inversion mass concentration of the spectrometer test data has a fluctuation of less than 1%, linearity error of less than 0.6%, and maximum indication error of -0.56 mg/m 3 upon testing an SO2 mass concentration of 20-100 mg/m 3 for 24 h.

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    Liangkun Huang, Quan Wen, Zhiyu Wen, Fan Yu, Haitao Liu, Mingjian Hong, Yingke Xie. Micro-Ultraviolet Spectrometer Analysis System[J]. Laser & Optoelectronics Progress, 2020, 57(5): 053003

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    Paper Information

    Category: Spectroscopy

    Received: Aug. 1, 2019

    Accepted: Sep. 6, 2019

    Published Online: Mar. 5, 2020

    The Author Email: Huang Liangkun (huang_lk@cqu.edu.cn), Wen Quan (Quan.Wen@enas.fraunhofer.de)

    DOI:10.3788/LOP57.053003

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