Chinese Optics Letters, Volume. 2, Issue 12, 12701(2004)

Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry

Yanli Du1,2, Huimin Yan1,2, Yong Wu1,2, Xiaoqiang Yao1,2, Yongjun Nie1,2, and Baixuan Shi1,2
Author Affiliations
  • 1State Key Lab of Modern Optical Instrumentation, National Engineering &
  • 2Technology Research Center for Optical Instrument, Zhejiang University, Hangzhou 310027
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    A new differential white light interference technique for the thickness measurements of metal foil is presented. In this work, the differential white light system consists of two Michelson interferometers in tandem, and the measured reflective surfaces are the corresponding surfaces of metal foil. Therefore, the measuring result is only relative to the thickness but not the position of metal foil. The method is non-contact and non-destructive, it has the advantages of high accuracy, fast detection, and compact structure. Theoretical analysis and preliminary experimental verifications have shown that the technique can be used to measure the thickness of foil in the range of 1 to 80 μm with accuracy better than 0.08 μm.

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    Yanli Du, Huimin Yan, Yong Wu, Xiaoqiang Yao, Yongjun Nie, Baixuan Shi. Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry[J]. Chinese Optics Letters, 2004, 2(12): 12701

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    Paper Information

    Category: Instrumentation, measurement, and metrology

    Received: May. 18, 2004

    Accepted: --

    Published Online: Jun. 6, 2006

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