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Infrared and Laser Engineering, Volume. 36, Issue 2, 274(2007)

Electrostatic deformation of membrane mirrors

[in Chinese]1,2,3、*, [in Chinese]1,2,3, [in Chinese]1,3, and [in Chinese]1,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Electrostatic deformation of membrane mirrors[J]. Infrared and Laser Engineering, 2007, 36(2): 274

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    Paper Information

    Category: 光学技术及应用

    Received: May. 21, 2006

    Accepted: Jun. 27, 2006

    Published Online: Sep. 18, 2007

    The Author Email: (陈新华(1982-)男江苏盐城人硕士主要从事光电技术研究.)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology