Laser & Optoelectronics Progress, Volume. 58, Issue 5, 0514005(2021)

Micromilling Blind Holes in Al2O3 Ceramics Using UV Laser

Xiaodong Liu, Liang Chen, Xizhao Wang*, and Zhengjun Xiong
Author Affiliations
  • Institute of Laser and Intelligent Manufacturing Technology, South-Central University for Nationalities, Wuhan , Hubei 430074, China
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    To realize high-quality functional structures in ceramic materials, a short-pulse ultraviolet nanosecond laser was used to study the application of laser micromilling technology in the fabrication of blind holes in Al2O3 substrates. The influence of the laser-pulse energy density, scanning speed of scanner, and total number of repeat scanning on the taper angle of the hole and bottom surface roughness was investigated using field lenses of different focal lengths in the milling experiment. The experimental results show that the focal length plays a significant role in the micromilling process, while the other parameters can be used for optimizing the processing quality. Therefore, appropriate selection of the optical focal length can effectively improve the processing quality of micromilling blind holes, in particular, their taper angle. A blind hole with minimum taper angle of 5.4°, a hole depth of 0.83 mm and a bottom surface roughness of 2.48 μm was achieved at a focal length of f =160 mm with a laser-pulse energy density of 25.80 J/cm2, a scanning speed of 1000 mm/s, and a total number of repeat scanning of 400.

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    Xiaodong Liu, Liang Chen, Xizhao Wang, Zhengjun Xiong. Micromilling Blind Holes in Al2O3 Ceramics Using UV Laser[J]. Laser & Optoelectronics Progress, 2021, 58(5): 0514005

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Jun. 1, 2020

    Accepted: Aug. 12, 2020

    Published Online: Apr. 19, 2021

    The Author Email: Wang Xizhao (wangxizhao@scuec.edu.cn)

    DOI:10.3788/LOP202158.0514005

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