Laser & Optoelectronics Progress, Volume. 48, Issue 8, 82202(2011)

Development and Application of Ultra-Smooth Optical Surface Polishing Technology

Ma Zhanlong*, Liu Jian, and Wang Junlin
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  • [in Chinese]
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    Ultra-smooth surfaces are widely used in the field of optics, and the polishing method is an important component of super-precision technology. Firstly, the characteristics of ultra-smooth surfaces are introduced, and the classification and comparison of the polishing methods are made. It is shown that the non-contact method is the ideal ultra-smooth surface polishing technology. Then the existing ultra-smooth surface polishing technologies are summarized, and the machining mechanism, precision and application spectrum are expounded. At last, the gap of ultra-smooth surface polishing technologies at home and abroad is present, and the trend of the technology is described.

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    Ma Zhanlong, Liu Jian, Wang Junlin. Development and Application of Ultra-Smooth Optical Surface Polishing Technology[J]. Laser & Optoelectronics Progress, 2011, 48(8): 82202

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    Paper Information

    Category: Reviews

    Received: Mar. 21, 2011

    Accepted: --

    Published Online: Jul. 26, 2011

    The Author Email: Zhanlong Ma (mzlcumt@126.com)

    DOI:10.3788/lop48.082202

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