Journal of Synthetic Crystals, Volume. 49, Issue 6, 1094(2020)

Polycrystalline Silicon Ingot Production Gas Online Detection System

ZHOU Shezhu*... MA Xiu, FENG Guangzhi and WANG Huiming |Show fewer author(s)
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    In view of the lack of effective and timely online testing methods for the current quality effects of ingot products, this paper proposes an on-line detection system for the production gas of polycrystalline silicon ingots. The system realizes the online automatic sampling real-time analysis and the function of over-limit alarm, which can be based on real-time automatic sampling and real-time analysis through dry pump sampling, pressurization test, and real-time analysis of the argon gas, which is an exhaust of the technical exhaust gas in the process of ingot production. Changes in the atmosphere in the furnace cavity during the production process, early detection of faults and abnormalities in the ingot furnace reduced the yield of abnormal products. Through the support of the follow-up battery data, the limit values of water leakage and gas leakage of the equipment can be determined to achieve the effect of fine-tuning the quality of silicon ingots and early warning of danger, and prepare for the pre-research for the ingot argon gas recovery system.

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    ZHOU Shezhu, MA Xiu, FENG Guangzhi, WANG Huiming. Polycrystalline Silicon Ingot Production Gas Online Detection System[J]. Journal of Synthetic Crystals, 2020, 49(6): 1094

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    Paper Information

    Category:

    Received: --

    Accepted: --

    Published Online: Aug. 7, 2020

    The Author Email: Shezhu ZHOU (zhoushezhu@126.com)

    DOI:

    CSTR:32186.14.

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