Chinese Journal of Lasers, Volume. 42, Issue 3, 308008(2015)

Study on Ronchi Shearing Interferometry for Wave-Front Aberration Measurement of Lithography Projection Lens

Wu Feibin1,2、*, Tang Feng1, Wang Xiangzhao1, Li Jie1,2, and Li Sikun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    Ronchi shearing interferometry modulates the spatial coherence of light field with extended source. With the advantages of simple structure, common- path, null- fringe detection, and so on the Ronchi shearing interferometer can be used for in situ aberration measurement of lithography projection lens. Ronchi shearing interferometry for wave-front aberration measurement of lithography projection lens is studied. The interference model of Ronchi shearing interferometer is derived by theories of grating diffraction and spatial coherence. A tenstep phase-shifting algorithm is proposed to eliminate negative effects of unwanted interference from the high order diffraction light, which limits the accuracy of phase retrieval. The effects of the first ±9 orders interference on phase retrieval accuracy can be eliminated. The peak-valley (PV) value and root mean square (RMS) value of theoretical phase retrieval error are less than 0.0046 λ and 0.0019 λ respectively. The theoretical interference model and the phase retrieval algorithm are validated.

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    Wu Feibin, Tang Feng, Wang Xiangzhao, Li Jie, Li Sikun. Study on Ronchi Shearing Interferometry for Wave-Front Aberration Measurement of Lithography Projection Lens[J]. Chinese Journal of Lasers, 2015, 42(3): 308008

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    Paper Information

    Category: measurement and metrology

    Received: Oct. 15, 2014

    Accepted: --

    Published Online: Feb. 3, 2015

    The Author Email: Feibin Wu (feibinwu@163.com)

    DOI:10.3788/cjl201542.0308008

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