Principle and Accuracy of the Stitching Interferometer

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Acta Optica Sinica, Volume. 23, Issue 10, 1241(2003)

[in Chinese]^1、*, [in Chinese]², [in Chinese]², [in Chinese]², and [in Chinese]¹

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¹[in Chinese]

²[in Chinese]

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Abstract Get PDF(in Chinese)

A kind of method is introduced for inspecting the large aperture optics using a small aperture interferometer. The resolving process of the stitching parameter is discussed based on the statistic method. Furthermore the regressive analyzing method has been used in discussing the stitching accuracy. The experiment and the calculation example are given.

Keywords

inspection accuracy subaperture stitching physical optics

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Principle and Accuracy of the Stitching Interferometer[J]. Acta Optica Sinica, 2003, 23(10): 1241

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Paper Information

Category: Physical Optics

Received: Jul. 22, 2002

Accepted: --

Published Online: Jun. 27, 2006

The Author Email: (zhang_rz@21cn.com)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology