Acta Optica Sinica, Volume. 29, Issue 11, 3082(2009)
Modeling and Experiment of Testing Asphere by Annular Subaperture Stitching Interferometer
In order to obtain the whole aspheric lens′ surface information,measurement of aspheric optical components is implemented by using spheric wave interferometry.Problems of precise location and removing relative rotation are resolved by the Givens transform of markers′ position.Each subaperture′s data is processed by the best fitting wave front which is the solution of the least object function value.Global optimization stitching model is established.A parabolic mirror of 150 mm in outer diameter,100 mm in inner diameter was used in three annular subapertures stitching experiment,the obtained root mean square (RMS) is 0.053 λ.Compared with full caliber interference measurement results obtained by compensator method,ΔWrms=0.052 λ,the relative error of RMS is 1.92%.Experimental results indicate that the approach reduces the requirements of high-precision rail in traditional annular subaperture stitching interference measurement.
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Wang Yuezhu, Tian Yi, Li Hongyu, Ju Youlun. Modeling and Experiment of Testing Asphere by Annular Subaperture Stitching Interferometer[J]. Acta Optica Sinica, 2009, 29(11): 3082
Category: Instrumentation, Measurement and Metrology
Received: Dec. 30, 2008
Accepted: --
Published Online: Nov. 16, 2009
The Author Email: Yuezhu Wang (ty.hit.edu@163.com)