Laser & Optoelectronics Progress, Volume. 49, Issue 7, 71203(2012)

An Ultra-Precision on-Machine Measurement Method of Aspheric Surface

Chen Fengjun*, Yin Shaohui, Yu Jianwu, Wang Yu, and Zhu Yongjian
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  • [in Chinese]
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    High quality ultra-precise machining of aspheric surface includes machining, test, and compensation machining. In order to remove repeating installation error and decrease on-machine time of the aspheric surface, a contact on-machine measurement method is proposed in combination with a laser interferometer. Shape error of the ground surface is measured directly on the machine. The on-machine measuring principle and aspheric measuring process are studied. The measurement errors caused by positional deviation and inclination angle error are corrected in ultra-precise contact on-machine measurement process. A small aspheric surface after grinding is measured by the on-machine contact measurement method and the off-line measurement system, and the measuring results are compared to confirm the validity of the proposed method.

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    Chen Fengjun, Yin Shaohui, Yu Jianwu, Wang Yu, Zhu Yongjian. An Ultra-Precision on-Machine Measurement Method of Aspheric Surface[J]. Laser & Optoelectronics Progress, 2012, 49(7): 71203

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Feb. 5, 2012

    Accepted: --

    Published Online: May. 18, 2012

    The Author Email: Fengjun Chen (abccfj@126.com)

    DOI:10.3788/lop49.071203

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