Laser & Optoelectronics Progress, Volume. 49, Issue 7, 71203(2012)
An Ultra-Precision on-Machine Measurement Method of Aspheric Surface
High quality ultra-precise machining of aspheric surface includes machining, test, and compensation machining. In order to remove repeating installation error and decrease on-machine time of the aspheric surface, a contact on-machine measurement method is proposed in combination with a laser interferometer. Shape error of the ground surface is measured directly on the machine. The on-machine measuring principle and aspheric measuring process are studied. The measurement errors caused by positional deviation and inclination angle error are corrected in ultra-precise contact on-machine measurement process. A small aspheric surface after grinding is measured by the on-machine contact measurement method and the off-line measurement system, and the measuring results are compared to confirm the validity of the proposed method.
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Chen Fengjun, Yin Shaohui, Yu Jianwu, Wang Yu, Zhu Yongjian. An Ultra-Precision on-Machine Measurement Method of Aspheric Surface[J]. Laser & Optoelectronics Progress, 2012, 49(7): 71203
Category: Instrumentation, Measurement and Metrology
Received: Feb. 5, 2012
Accepted: --
Published Online: May. 18, 2012
The Author Email: Fengjun Chen (abccfj@126.com)