Acta Photonica Sinica, Volume. 40, Issue 1, 1(2011)
Preparation and Research on Self-supported Zr Filter for Soft-X-ray
Filters for soft-x-ray are mostly self-supported metal thin films. Under experimental circumstance, while long exposure to the air of the self-supported metal thin film, impurity atoms will enter into self-supported thin film, which will result in decline of self-supported thin film′s optics performance. Zr filters have high transmittance at band from 5 nm to 20 nm because of its low mass absorption coefficient and density. After vapor depositing NaCl film on cleaned float glass as a release agent, Zr film was sputtered on NaCl film. Self-supported Zr film wass prepared after NaCl film being dissolved in deionized water. To prevent surface oxidizing and impurity atoms from the air entering Zr film in experimental environment, C or Si film with 10 nanometer thickness was sputtered on both Zr film sides for separating Zr from the air. Measurement result of C/Zr/C and Si/Zr/Si film shows that C or Si film has little influence on self-supported Zr film performance.
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WU He-yun, WU Yong-gang, WANG Zhen-hua, LU Gang, LING Lei-jie, XIA Zi-huan, CHEN Nai-bo. Preparation and Research on Self-supported Zr Filter for Soft-X-ray[J]. Acta Photonica Sinica, 2011, 40(1): 1
Received: Jun. 17, 2010
Accepted: --
Published Online: Mar. 8, 2011
The Author Email: He-yun WU (why760116@126.com)
CSTR:32186.14.