Chinese Optics Letters, Volume. 4, Issue 10, 580(2006)

Scanned-cantilever atomic force microscope with large scanning range

[in Chinese] and [in Chinese]
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
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    A scanned-cantilever atomic force microscope (AFM) with large scanning range is proposed, which adopts a new design named laser spot tracking. The scanned-cantilever AFM uses the separate flexure x-y scanner and z scanner instead of the conventional piezoelectric tube scanner. The closed-loop control and integrated capacitive sensors of these scanners can insure that the images of samples have excellent linearity and stability. According to the experimental results, the scanned-cantilever AFM can realize maximal 100*100 (micron) scanning range, and 1-nm resolution in z direction, which can meet the requirements of large scale sample testing.

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    [in Chinese], [in Chinese]. Scanned-cantilever atomic force microscope with large scanning range[J]. Chinese Optics Letters, 2006, 4(10): 580

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    Paper Information

    Received: Apr. 12, 2006

    Accepted: --

    Published Online: Oct. 31, 2006

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