Chinese Optics Letters, Volume. 11, Issue s1, S10204(2013)

Numerical shaper optimization for sputtered optical precision f ilters

Andreas Pflug, Michael Siemers, Thomas Melzig, Daniel Rademacher, Tobias Zickenrott, and Michael Vergohl

A novel optimization procedure for optical precision sputter coaters with respect to the film homogeneity is demonstrated. For a coater concept based on dual cylindrical sputtering sources and a rotating turn-table as sample-holder, the inherent radial decay of the film thickness must be compensated by shaper elements. For that purpose, a simulation model of the particle flux within such a coater is set up and validated against experimental data. Subsequently, the shaper design is optimized according to the modeled metal flux profile. The resulting film thickness deviations are minimized down to ±0.35%.

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Andreas Pflug, Michael Siemers, Thomas Melzig, Daniel Rademacher, Tobias Zickenrott, Michael Vergohl. Numerical shaper optimization for sputtered optical precision f ilters[J]. Chinese Optics Letters, 2013, 11(s1): S10204

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Paper Information

Category: Deposition and process control

Received: Dec. 10, 2012

Accepted: Dec. 26, 2012

Published Online: May. 30, 2013

The Author Email:

DOI:10.3788/col201311.s10204

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