In view of the advantages of xenon lamp and its spectral energy distribution familiar to the sun, the xenon lamp is usually used to simulate the solar spectrum in the solar simulator. Because of the spectral differences between xenon lamp and the sun, it is necessary to develop a kind of minus filter to correct the spectrum of xenon lamp. The minus filter works under the irradiation of major light, so the materials must have low absorption and high anti-energy threshold. We prepare the film on quartz crystal by means of electronic beam and ion-beam assisted deposition system. Reasonable deposition mode and optimal processing parameters are adopted for a smooth surface layer with high surface quality and solidity, which passes through anti-energy test. The filter finally meets the applying demand perfectly.