Laser & Optoelectronics Progress, Volume. 60, Issue 7, 0716001(2023)
Simulation Study on Behavior Characteristics of Ion-Beam Sputtering to Fused Silica, Silicon, Gold, and Copper Using Monte Carlo Method
In this study, the Monte Carlo method is used to examine the effects on the sputtering characteristic parameters of sputtering yields, damage density distributions, and longitudinal energy damage distributions with different sputtering parameters and material models. Based on the particle tracking and physical statistical results of SRIM-2013 software, the effects of the initial energy of the ion beam, incident angle, ion type, and material type on surface sputtering and energy deposition are analyzed, and the relationship among surface damage distribution, sputtering parameters, and sputtering yield are studied. The results show that a beam-source inclination of 85° can promote the density concentration and peak density group of cascading particles to a surface of 2.8×108 atom/cm2 and 3
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Bangjie Hu, Qinghua Zhang, Mincai Liu, Qiao Xu, Yaguo Li. Simulation Study on Behavior Characteristics of Ion-Beam Sputtering to Fused Silica, Silicon, Gold, and Copper Using Monte Carlo Method[J]. Laser & Optoelectronics Progress, 2023, 60(7): 0716001
Category: Materials
Received: Nov. 4, 2021
Accepted: Feb. 18, 2022
Published Online: Mar. 31, 2023
The Author Email: Li Yaguo (yargolee@163.com)