Acta Photonica Sinica, Volume. 40, Issue 10, 1505(2011)
Formation Process of Pyramids on Single Crystal Si Surface
The texturing process with alkaline solution added a new additive on single-crystal silicon surface was discussed.At different times,alkaline solution added a new additive was used to etch the Si wafers,and samples were scanned by scanning electron microscopy.The results show that there are a few different size pyramids and smooth regions in large-area on the Si surface after etching 10 min; after etching 15 min,the sizes of pyramids become uniform,and the areas of smooth regions will reduce; after etching 20 min,the etched surface is covered with the 2~4 μm of pyramids,and the distribution is more uniformly-densely; after etching 25 min,the sizes of pyramids increase again in the over-etching process.The experiments illustrate that the new additive can effectively reduce the texturing time,make an ideal textured structure,and be applied in industry.
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TIAN Jia-tong, FENG Shi-meng, WANG Kun-xia, Xu Hua-tian, YANG Shu-quan, LIU feng, HUANG Jian-hua, PEI Jun. Formation Process of Pyramids on Single Crystal Si Surface[J]. Acta Photonica Sinica, 2011, 40(10): 1505
Received: May. 3, 2011
Accepted: --
Published Online: Nov. 9, 2011
The Author Email: Jia-tong TIAN (rhrtjt@yahoo.cn)