Chinese Optics Letters, Volume. 2, Issue 6, 06328(2004)

Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates

Dailin Li*, Xiangzhao Wang, and Yingming Liu
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
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    A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can be decreased greatly. The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.

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    Dailin Li, Xiangzhao Wang, Yingming Liu. Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates[J]. Chinese Optics Letters, 2004, 2(6): 06328

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    Paper Information

    Category: Instrumentation, measurement, and metrology

    Received: Mar. 15, 2004

    Accepted: --

    Published Online: Jun. 6, 2006

    The Author Email: Dailin Li (ldl@siom.ac.cn)

    DOI:

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