In Inertia Confinement Fusion (ICF) physical experiments, target-positioning accuracy directly affects the success rate of target hitting. Three CCDs are used to acquire images of target from different viewing angles, and then the spatial coordinate values and the rotation matrix of target are calculated by integrating the characteristic values of the three CCDs. To obtain the characteristic values, an image processing method of data fusion is presented, which combines template matching with ellipse contour fitting technology. Sub-pixel accuracy of location is obtained by adopting bicubic interpolation. It is proved by experiments that this method has the advantages of high stability, small repeatability error of less than 1 μm and high accuracy over 2 μm.