In recent years, with a rapid societal development, the utilization of clean energy becomes a necessity. This demand emphasizes on energy storage equipment, prompts some research on efficient energy storage, energy loss reduction, and environmental impact mitigation. The existing prevalent energy storage devices encompass batteries, supercapacitors, and dielectric capacitors. Batteries boast a maximum energy storage density, but exhibit a comparatively lower power density. Supercapacitors strike a balance with a moderate energy storage and a power density. Dielectric capacitors, characterized by their unparalleled power density and rapid charge/discharge rate, have extensive applications in various domains such as pulsed laser weaponry, cardiac pacemakers, and energy vehicles.Thin film materials emerge as a favorable option for addressing device miniaturization and enhancing energy density due to their smaller volume and higher energy storage density compared to polymers and block ceramics. The energy storage ceramic thin film materials can be classified based on intrinsic polarization states, i.e., encompassing linear dielectric (LD), paraelectric (PE), ferroelectric (FE), relaxation ferroelectric (RFE), superparaelectric (SPE), and antiferroelectric (AFE) materials.LD exhibits notable breakdown strength (Eb) and energy storage efficiency (η). However, their low dielectric constant (r) and polarization (P) result in a diminished energy storage density (Urec). Elevating r stands as a pivotal for enhancing the Urec of LD. PE demonstrates non-linear changes in P and r with applied electric fields (E). For the removal of E, PE maintains a non-polar state without spontaneous polarization, featuring a medium P and a substantial Eb. FE exhibits a spontaneous polarization with large P and r. Nevertheless, their prominent residual polarization (Pr), dielectric loss (tan), and increased defect density contribute to a lowered Eb, constraining the application of FE in energy storage. Recent research in FE focuses on mitigating Pr and augmenting Eb. In contrast to FE, RFE typically exhibits nanodomains or polar nanodomains in their domain structure. The coupling among these domains is relatively weak, rendering them highly responsive to electric fields. RFE often displays a substantial P, a minimal Pr, and a slender P-E hysteresis loop. This characteristic facilitates the attainment of elevated Urec and η. SPE maintains a local polar order, manifesting as polarity clusters spanning only a few nanometers or cells. This arrangement further diminishes mutual coupling between domains, reducing a polarity-switching energy barrier. Losses are minimized, significantly enhancing both Urec and η. AFE features a distinctive double hysteresis loop, stemming from the parallel and opposite alignment of spontaneous polarization on adjacent lattices. This configuration results in near-zero Pr, undergoing a reversible AFE-FE phase transition under specific E, and yielding a high r and substantial P. This property enables the achievement of a heightened Urec, presenting promising applications in energy storage.In the realm of energy storage ceramic thin film materials, enhancing Pmax, Eb, and minimizing Pr are pivotal for improving energy storage performance. To achieve these objectives, diverse modification methods are used to encompass the preparation technology, component design, and interface engineering.For the effective preparation, optimization of preparation methods, alteration of annealing processes, substitution of electrode materials, aging, and the fabrication of multi-layer film capacitors (MLFC) are employed. These interventions regulate the orientation growth and oxygen vacancy content of the material, thereby enhancing the energy storage performance of the ceramic thin film capacitor. Note that the preparation of MLFC demonstrates a substantial Urec (i.e., 78.3 J/cm3) and η (i.e., 90.2%) and offers valuable insights for the commercialization of ceramic film capacitors.The composition design encompasses elements such as doping, two-phase or multiphase solid solutions, entropy control, and incorporation of nanoparticles. Specifically, element doping and the creation of two-phase or multiphase solid solutions can achieve a slender P-E hysteresis loop via transforming FE to RFE. Using Mn2+ to form defect complexes with oxygen vacancies is investigated. This reduces the oxygen vacancy content and curbs leakage current density, thereby enhancing the energy storage performance for various energy storage ceramic thin film materials. This method offers a universal approach to mitigating leakage current issues. Entropy control strategies introduce multiple elements into the system, utilizing chemical disorder caused by atomic size mismatch to reduce Pr and delay saturation polarization, thereby improving energy storage performance. Nanoparticle composite can be prepared via adding the nanoparticles into matrix material evenly, with the base materials to improve the energy storage of materials performance as a whole.Interface engineering primarily enhances Eb via manipulating material structures, incorporating effects (i.e., ‘dead-layer’ effect, electric field amplification effect, space charge effect, heterojunction effect, interface barrier effect, and interlayer coupling effect). This optimization aims to achieve a superior energy storage performance. Multilayer films in interface engineering typically involve the use of two or more component materials, allowing the strategic utilization of diverse material characteristics to maximize effectiveness. For instance, ‘dead-layer’ engineering involves the incorporation of high resistivity and low r Al2O3 layer as the top layer, enhancing the Eb of the multilayer film. In multilayer films, the interplay of various effects collectively affects their electrical properties and energy storage performance. The comprehensive consideration of these effects is crucial in the design and research of multilayer films. The energy storage performance of multilayer films can be improved, further aligning dielectric energy storage films with the practical applications.Summary and prospects Dielectric energy storage ceramic thin film materials have attracted recent attention due to their superior power density and rapid charge/discharge rate. This review summarized recent research progress on dielectric energy storage ceramic thin film materials (i.e., linear dielectric, paraelectric, ferroelectric, relaxation ferroelectric, superparaelectric, and antiferroelectric materials). This review also represented the enhanced energy storage performance via the preparation processes, component design, and interface engineering. With a diverse range of dielectric energy storage ceramic thin film materials and various methods for improving their energy storage performance, the practical applications can tailor material selection and modification approaches. To achieve the commercialization of dielectric energy storage ceramic thin films, efforts should be made for strengthening theoretical research and developing new types of ceramic thin film-based devices. This can maintain the superior energy storage performance while preparing devices, thereby laying a foundation for the application of dielectric energy storage ceramic thin film capacitors.