Acta Optica Sinica, Volume. 16, Issue 9, 1326(1996)
Fabrication of Refractive Microlens Array by Melting Photoresist
A new method of fabricating refractive microlens by melting photoresist was presented in this paper. The microlens array composed of 20 × 20 F/2 microlens with 90 μm diameter on 100 μm centers have been obtained. The wave aberration of the microlens was estimated less than 1.3 wavelength. The principle of the method and the design model of refractive microlens are described. The effects of fabrication parameters on the quality of the microlens are discussed.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of Refractive Microlens Array by Melting Photoresist[J]. Acta Optica Sinica, 1996, 16(9): 1326