XPS Analysis of AlGaN Film Grown by MOCVD

Acta Photonica Sinica, Volume. 32, Issue 8, 925(2003)

[in Chinese]^1,2, [in Chinese]¹, [in Chinese]³, and [in Chinese]³

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. XPS Analysis of AlGaN Film Grown by MOCVD[J]. Acta Photonica Sinica, 2003, 32(8): 925

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Paper Information

Category: Optoelectronics

Received: Sep. 26, 2002

Accepted: --

Published Online: Sep. 18, 2007

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