The practical large energy and high power excimer laser are widely used in materials processing and surface treatment. The applications of excimer lasers in the flat panel display industry, solar photovoltaic industry, semiconductor industry and automobile manufacturing industry were introduced. The key technologies employed to improve the performance of excimer lasers were analyzed, including the technology of large area uniform discharge, pre-ionization, and high voltage pulse technology. The dual-chamber synchronization technology was used to obtain higher energy and power.