Optics and Precision Engineering, Volume. 30, Issue 13, 1523(2022)

Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation

Sida LÜ1,2, Mingzhuo LI1,2, Haixiang HU1、*, Donglin XU1、*, and Xuejun ZHANG1
Author Affiliations
  • 1Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun30033, China
  • 2University of Chinese Academy of Sciences, Beijing100049, China
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    The degradation of the detected wavefront during the propagation of the compensation optical path in the interferometric compensation detection system inevitably introduces interferometric coherent imaging aberration, causing the instrument transfer function to degrade sharply in the high frequency band and severely limiting the detection accuracy of interferometric compensation detection. In this study, an interferometric coherence imaging aberration model is developed to reveal the degradation mechanism of wavefront spatial frequency information caused by interferometric coherence imaging aberration. First, a non-rotationally symmetric wavefront propagation theory is proposed to describe the evolution mechanism of the non-rotationally symmetric wavefront. Second, the mathematical model of interferometric coherent imaging aberration is established by combining the hybrid analysis method of fine beam tracing and wavefront evolution, and the numerical value of the FM function under the condition of non-rotationally symmetric secondary wavefront propagation is realized to further establish the function relationship between the out-of-focus amount and wavefront distribution. Finally, the experimental verification of the model is completed using the interference compensation detection system. The experimental results show that the residuals of the actual and expected values are less than 0.05 waves, the symmetric mean absolute percentage error (SMAPE) of the model is 8.26%, and the mean relative error (MRE) is 3.35%; therefore, the proposed model has a better fit than the theoretical one based on Talbot effect and Fresnel diffraction analysis proposed by the University of Arizona. The accuracy and predictability of the proposed model, which is important for improving the detection accuracy of interference compensation detection, are verified.

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    Sida LÜ, Mingzhuo LI, Haixiang HU, Donglin XU, Xuejun ZHANG. Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation[J]. Optics and Precision Engineering, 2022, 30(13): 1523

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    Paper Information

    Category: Modern Applied Optics

    Received: Dec. 21, 2021

    Accepted: --

    Published Online: Jul. 27, 2022

    The Author Email: HU Haixiang (hhx@ciomp.ac.cn), XU Donglin (xuedl@ciomp.ac.cn)

    DOI:10.37188/OPE.20223013.1523

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