Infrared and Laser Engineering, Volume. 46, Issue 4, 404001(2017)
Antireflective silicon based microstructures for the mid- and long-wavelength infrared
Si based micro-pillar arrays and micro-cone arrays were fabricated using micro processing technology, the reflection performance of the micro structures was studied in the long wave infrared wavelengths (2.5-9 μm) reflection performance of different polarized light. Micro-fabrication combined with modeling analysis of silicon based micro-pillar and micro-cone arrays have been performed to study the effects of structural parameters on the reflectivity of infrared light from 2.5-9 μm. Simulation results using rigorous coupled wave analysis (RCWA) method is in line with the test results from a Fourier transform infrared spectrometer (FTIR). It is found that the antireflection characteristics can be obtained for both transverse electric(TE) and transverse magnetic(TM) polarizations, and the micro-cone arrays have lower reflectivity than the micro-pillar arrays. Moreover, the optimized micro-cone arrays show a reflectivity of only 2% or lower from 2.5-6.5 μm under TM polarization, with wide-spectrum and omnidirectional antireflection characteristics.
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Wu Qihua, Xiong Min, Huang Yong, Zhang Baoshun, Bai Yu. Antireflective silicon based microstructures for the mid- and long-wavelength infrared[J]. Infrared and Laser Engineering, 2017, 46(4): 404001
Category: 红外技术及应用
Received: Aug. 5, 2016
Accepted: Sep. 3, 2016
Published Online: Jun. 30, 2017
The Author Email: Qihua Wu (qhwu2014@sinanno.ac.cn)