Piezoelectrics & Acoustooptics, Volume. 42, Issue 4, 573(2020)

Design and Study on Power Supply of Four-Legged Piezoelectric Actuators

JIA Danping1, HAN Shuo1, YANG Xiaofeng2, and WANG Zhenhua3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    The piezoelectric actuators have the characteristics of nanometer/micrometer positioning and are widely used in precision control motion platforms. Therefore, the requirements for the speed and accuracy of piezoelectric actuators are becoming higher and higher. According to the driving principle of stepping piezoelectric motor and the dynamic model of quadruped piezoelectric actuator, a driving power supply for the quadruped piezoelectric actuator with new stacked structure is designed in this paper. The power supply is linear with a high voltage of ±250 V and a high frequency of 1.5 kHz. Two strategies of hardware impedance compensation and signal switching are adopted to further eliminate the influence of capacitive load on signal bandwidth, so that the quadruped piezoelectric actuator can output at high precision and constant speed. Meanwhile, the hardware in-loop simulation and testing methods are used to set up an experimental platform. The results show that in the laser interferometer acquisition equipment with a resolution of 1 nm, the motion test of the point-to-point 50.7 nm four-legged piezoelectric actuator was realized.

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    JIA Danping, HAN Shuo, YANG Xiaofeng, WANG Zhenhua. Design and Study on Power Supply of Four-Legged Piezoelectric Actuators[J]. Piezoelectrics & Acoustooptics, 2020, 42(4): 573

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    Paper Information

    Received: Mar. 4, 2020

    Accepted: --

    Published Online: Apr. 21, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2020.04.030

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