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Optics and Precision Engineering, Volume. 16, Issue 5, 839(2008)

Macro modeling method for electrostatical drive silicon diaphragm

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    [in Chinese], [in Chinese], [in Chinese]. Macro modeling method for electrostatical drive silicon diaphragm[J]. Optics and Precision Engineering, 2008, 16(5): 839

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    Received: Jun. 10, 2007

    Accepted: --

    Published Online: Aug. 17, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology