To increase the output voltage and reduce the volume and cost of the high voltage damped oscillator, a 4×4 stage self-triggering Marx structure damped oscillator model is established in this paper. In this model, the main switch of each stage adopts series IGBTs module based on capacitor trigger mode. Only one isolated signal is provided to control the turn-on and turn-off of the primary discharge switch tube. The grid of the adjacent discharge tube is automatically charged and discharged through the interstage capacitance to make it turn-on and turn-off. The model improves the working voltage of Marx single stage and simplifies the driving circuit of each stage, and solves the problem of dynamic and static voltage equalization of switching tube by adding buffer circuit. Based on this topology, a prototype of a high-voltage damped oscillator is built, which outputs 16 kV damped oscillation waveform with a frequency of 1 MHz on an inductive load. The rise time of the waveform is about 75 ns, and the repetition frequency is 500 Hz. The prototype is small in size and stable in operation, which verifies the feasibility of the scheme.