Opto-Electronic Engineering, Volume. 49, Issue 2, 210389-1(2022)

Electrons dynamics control micro-hole drilling using temporally/spatially shaped femtosecond laser

Chao Zhang, Min Li, Baichen Ye, Jianying Wu, Zhi Wang, and Xiaowei Li*
Author Affiliations
  • Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
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    As a common structure, microholes are widely used in various fields, including biomedical, aerospace, 3D packaging and so on. Femtosecond laser has unique advantages in drilling high-quality microhole due to its ultra-short pulse duration and ultra-high peak power. This review covers temporally/spatially shaped femtosecond laser microhole drilling methods and their applications over the past decade, including femtosecond laser temporally/spatially shaped methods, temporally/spatially shaped femtosecond laser microhole drilling based on electrons dynamics control, and the applications of microhole in transmittance enhancement and anti-reflection, material cutting, oil/water separation, fog collection and gas collection. Furthermore, present challenges and future research opportunities in this field are analyzed.

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    Chao Zhang, Min Li, Baichen Ye, Jianying Wu, Zhi Wang, Xiaowei Li. Electrons dynamics control micro-hole drilling using temporally/spatially shaped femtosecond laser[J]. Opto-Electronic Engineering, 2022, 49(2): 210389-1

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    Paper Information

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    Received: Dec. 3, 2021

    Accepted: --

    Published Online: Apr. 6, 2022

    The Author Email: Li Xiaowei (lixiaowei@bit.edu.cn)

    DOI:10.12086/oee.2022.210389

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