Acta Optica Sinica, Volume. 31, Issue 10, 1013002(2011)
Polymer Micro-Ring Resonator Filter with High Quality Factor
Based on the ultraviolet resist (ZPU) and polysulfone polymer materials, the structure parameters of the polymer ring resonator such as waveguide cross section, bending radius, waveguide gap in the coupling region are designed and optimized, and the filtering characteristic is analyzed. The polymer micro-ring resonator is fabricated using the traditional micro-fabrication techniques including contact lithography and reactive iron etching. The experimental results agree well with the simulation results. Results show that around the telecom wavelength of 1550 nm, the free spectral range, 3 dB bandwidth, insertion loss, extinction ratio and quality factor of the polymer micro-ring resonator are 0.21 nm, 0.04 nm, 26 dB, 11 dB, 3.87×104, respectively. The polymer micro-ring resonator is very useful for telecom and integrated sensor chips.
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Yun Binfeng, Hu Guohua, Cui Yiping. Polymer Micro-Ring Resonator Filter with High Quality Factor[J]. Acta Optica Sinica, 2011, 31(10): 1013002
Category: Integrated Optics
Received: Mar. 18, 2011
Accepted: --
Published Online: Sep. 5, 2011
The Author Email: Binfeng Yun (ybf@seu.edu.cn)