Optics and Precision Engineering, Volume. 24, Issue 11, 2777(2016)

Design of double-sided fast steering mirror based on piezoelectric actuating

SONG Sheng1,*... LIU Chong-fei1, YUAN Zi-yong1, XU Wei-ming1, and SHU Rong12 |Show fewer author(s)
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  • 2[in Chinese]
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    According to the requirements of laser radars for beam wavefront, a piezo-activated double-sided and fast-steering mirror was designed to realize the high-accuracy beam pointing and wide scanning range of a coherent laser remote system. The mechanical structure of the system and its electronics control method were researched. In consideration of the system requirements for the point angle, clear aperture and the signal bandwidth, an actuator and a displacement amplification mechanism were chosen. To overcome the nonlinear effect of piezoelectric ceramics, such as hysteresis and creep, an analog Proportion Intergration Differentiation(PID) closed-loop feedback control method by taking a strain gauge as the displacement sensor was designed. By analysis of the natural modal frequencies of the pointing mirror, the circum support was determined as the mirror support manner. Experimental results indicate that the pointing accuracy and scanning speed of the system are respectively 27 μrad and 2.7 rad/s at the range of 27 mrad×27 mrad, which satisfies the requirements of laser remote sensing for detection ranges, detection accuracy and detection speeds.

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    SONG Sheng, LIU Chong-fei, YUAN Zi-yong, XU Wei-ming, SHU Rong. Design of double-sided fast steering mirror based on piezoelectric actuating[J]. Optics and Precision Engineering, 2016, 24(11): 2777

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    Paper Information

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    Received: May. 10, 2016

    Accepted: --

    Published Online: Dec. 26, 2016

    The Author Email: Sheng SONG (songsheng03@126.com)

    DOI:10.3788/ope.20162411.2777

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