Acta Optica Sinica, Volume. 34, Issue s1, 111004(2014)
Vibration Performance Researching in the MEMS Galvanometer of an Imaging Lidar System
The micro electro mechanical system (MEMS) galvanometer of an imaging lidar system is analyzed, experiment measures the key elements of the vibration performance of MEMS: frequency and driving voltag. The results show that scanning in the frequency of 60~200 Hz and driving voltage belove 60 V can make wide angle scanning and satisfy the demand of 64~256 point per second.
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Qu Yang, Wang Chunhui, Pang Yajun, Tang Tiantian. Vibration Performance Researching in the MEMS Galvanometer of an Imaging Lidar System[J]. Acta Optica Sinica, 2014, 34(s1): 111004
Paper Information
Category: Imaging Systems
Received: Jan. 15, 2014
Accepted: --
Published Online: Aug. 18, 2014
The Author Email: Yang Qu (14240829@qq.com)
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