Laser & Optoelectronics Progress, Volume. 52, Issue 6, 60004(2015)

Research Status and Progress of Measurement Uncertainty in Interferometric Testing of Surface Figure

Quan Haiyang1,2、*, Hou Xi1, and Wu Fan1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    Estimating uncertainty of measurement is an effective route to improve quality of surface figure testing in laboratories. To promote the popularization and application of measurement uncertainty in the field of interferometric surface figure testing, the latest progress of uncertainty evaluation in figure measurements is reviewed. The associated international standards of metrological traceability and uncertainty are introduced. Evaluating measurement uncertainty with the bottom-up approach (i.e. modelling approach) and top-down approach is mainly introduced. The progress and development of uncertainty evaluation are focused on in interferometric surface figure measurements. The development direction and further development of uncertainty evaluation method in interferometric surface figure measurements are prospected.

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    Quan Haiyang, Hou Xi, Wu Fan. Research Status and Progress of Measurement Uncertainty in Interferometric Testing of Surface Figure[J]. Laser & Optoelectronics Progress, 2015, 52(6): 60004

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    Paper Information

    Category: Reviews

    Received: Nov. 13, 2014

    Accepted: --

    Published Online: May. 26, 2015

    The Author Email: Haiyang Quan (alsea111.1989@163.com)

    DOI:10.3788/lop52.060004

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