Laser & Optoelectronics Progress, Volume. 52, Issue 8, 81201(2015)

Measurement of Piezoelectric Device Response by Optical Interferometry

Yang Bin1,2、*, Zhao Qi1, Zhou Jun2,3, Chen Yanru1, Wu Jiabin2, and Song Weier2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    The displacement-voltage characteristics of a pre-load structure piezoelectric ceramic is measured by using optical interferometry.The influence of the resonance of piezoelectric device and its supporting structure on the accuracy of the measurement is observed.Furthermore,the comparative experiments are set up to study a variety of piezoelectric devices under several driving frequencies.It is proved that multiple-time measurement based on traditional device is necessary to get a more rigorous result of the piezoelectric response parameters.

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    Yang Bin, Zhao Qi, Zhou Jun, Chen Yanru, Wu Jiabin, Song Weier. Measurement of Piezoelectric Device Response by Optical Interferometry[J]. Laser & Optoelectronics Progress, 2015, 52(8): 81201

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 3, 2015

    Accepted: --

    Published Online: Jul. 29, 2015

    The Author Email: Bin Yang (ybin319@163.com)

    DOI:10.3788/lop52.081201

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