A kind of silane coupling agent KH560-based organic / inorganic hybrid electro-optic (E-O) material was synthesized by Sol-Gel method. The reaction mechanism of hydrolysis and condensation of KH560 in the case of hydrochloric acid as a catalyst was analysed. Then the surface morphology, refractive index and E-O properties of the thin films were characterized by means of atomic force microscopy (AFM), ellipsometry, and simple reflection method. At last, the poled polymer films with good shape and alterable refractive index were obtained. The E-O coefficient was measured to be 3.5 pm/V @1 310 nm wavelengh based on the simple reflection method. According to the flexibility of this material, the structure of the strip-loaded waveguide was designed.And the two-dimensional and three-dimensional light fields were also simulated by the Opti-BPM software. After exploring the processing technology, the fabrication of the waveguide with strip-loaded structure was completed. Finally the near-field images of this waveguide were obtained.