Acta Optica Sinica, Volume. 29, Issue 11, 3192(2009)
Axial Focusing Characteristics of Low F-Number Diffractive Optical Elements with Continuous Relief Fabricated by Laser Direct Writing
In order to study the effect of convolution effect and fabrication errors on the axial focusing characteristics of low F-number diffractive optical elements (DOE) with continuous relief fabricated by laser direct writing,a theoretical model is established using Rayleigh-Sommerfeld diffraction theory to describe the influence of the structure parameters,the diameter of the writing spot,the interscan distance and the fabrication errors on the diffraction focusing characteristics of low F-number DOE with continuous relief,and continuous-relief DOE with a design wavelength of 441.6 nm,a F-number of 4 and a phase depth factor of 3 are fabricated and measured.The good agreement between theoretical and experimental results verifies the validity of the diffraction model established.
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Shan Mingguang, Zhong Zhi, Guo Lili, Zhi Pei. Axial Focusing Characteristics of Low F-Number Diffractive Optical Elements with Continuous Relief Fabricated by Laser Direct Writing[J]. Acta Optica Sinica, 2009, 29(11): 3192
Category: Optical Devices
Received: Nov. 3, 2008
Accepted: --
Published Online: Nov. 16, 2009
The Author Email: Mingguang Shan (smgsir@gmail.com)