Acta Optica Sinica, Volume. 4, Issue 4, 322(1984)

A lithographic optical system having only one symmetric plan

WANG ZHIJING, LI YUANKANG, and JIANG JIANZHONG
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    Optical system having only one symmetric plan is difficult to correct aberrations. We consider the imaging properties of ellipsoid near the focus and of concentric spheric surface,, and appropriately combine it. An optical system having field diameter 50~ 70mm, N. A. 0.15-0.1, and imago qualities near diffraction limit is obtained.

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    WANG ZHIJING, LI YUANKANG, JIANG JIANZHONG. A lithographic optical system having only one symmetric plan[J]. Acta Optica Sinica, 1984, 4(4): 322

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 27, 1983

    Accepted: --

    Published Online: Sep. 15, 2011

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