Optics and Precision Engineering, Volume. 26, Issue 7, 1794(2018)

High-precision target pose adjustment based on 3-CCD microscope vision system

SONG Wei... SONG Zhi-jie, ZHANG Ya-nan and SHEN Lin-yong |Show fewer author(s)
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    A 3-CCD microscope vision system is established to realize micro-target pose adjustment in a high-power laser device with high precision. Image-based visual control method is performed, and the image Jacobian matrix is derived online by using the active movement of the micro-target. The PI controller is used to adjust the micro-targets pose so that the image features are close to the objective position. In the experiments, we compare the image-based visual control method with the position-based visual control method, which was proposed in our previous research by using a 3D posture description algorithm to control the micro-target to the desired pose. The precision of target positioning and orientation error for the image-based visual control method are 0.07 μm and 0.02 μrad, respectively, whereas the precision of target positioning and orientation error values for the position-based visual control method are 0.16 μm and 0.07 μrad, respectively. The experimental results show that the image-based visual control method is robust for system errors such as kinematic and visual calibration errors. Thus, it possesses better precision and stability for target pose adjustment.

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    SONG Wei, SONG Zhi-jie, ZHANG Ya-nan, SHEN Lin-yong. High-precision target pose adjustment based on 3-CCD microscope vision system[J]. Optics and Precision Engineering, 2018, 26(7): 1794

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    Paper Information

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    Received: Nov. 20, 2017

    Accepted: --

    Published Online: Oct. 2, 2018

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    DOI:10.3788/ope.20182607.1794

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