Acta Optica Sinica, Volume. 5, Issue 1, 89(1985)
Characteristics of WO3 film with large area deposited by laser photolysis
It is reported in this article that WO3 film was deposited by XeCl laser photolysis for the first time. The area of the film is 1cm2 and the deposition, rate is 41 A/pulse, the Main characteristics of the film, including its composition and resistivity etc, have been measured.
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SHEN GUANGPING, ZHOU ZHENZHUO, QIN MINGXIN. Characteristics of WO3 film with large area deposited by laser photolysis[J]. Acta Optica Sinica, 1985, 5(1): 89