Infrared and Laser Engineering, Volume. 44, Issue 10, 3000(2015)

Manufacturing of double-layered multimode optical waveguides in glass substrate

Hao Yinlei1、*, Zeng Fulin2, Wang Zhijian2, Hu Wenxue1, Chen Sicong1, Yang Jianyi1, and Wang Minghua1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Double-layered multimode waveguides were fabricated in optical glass substrate, each layer being formed by melt salt ion-exchange(IE), and subsequent field-assisted ion-migration(FAIM). Characterization of the double-layered waveguide chips were performed by microscopic observation of waveguide cross-section, output pattern observation, and insertion loss and crosstalk measurement. Results shows that dimensions of waveguides core at top layer and bottom layer core are respectively 29 μm×19 μm and 31 μm×20 μm, and output pattern of waveguide at different layers are of nearly the same dimensions. Waveguide loss characterization show that propagation loss of waveguide at top layer and bottom layer are 1.00±0.32 dB/cm and 0.78±0.35 dB/cm, and crosstalk between neighbor waveguide at different layers is approximately 17.7 dB. Analysis demonstrate that interconnection density can be doubled by adopting double-layered waveguide, thus this kind of waveguide can be expected a promising prospect in improving EOCB performance.

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    Hao Yinlei, Zeng Fulin, Wang Zhijian, Hu Wenxue, Chen Sicong, Yang Jianyi, Wang Minghua. Manufacturing of double-layered multimode optical waveguides in glass substrate[J]. Infrared and Laser Engineering, 2015, 44(10): 3000

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    Paper Information

    Category: 光电器件与材料

    Received: Feb. 11, 2015

    Accepted: Mar. 10, 2015

    Published Online: Jan. 26, 2016

    The Author Email: Yinlei Hao (haoyinlei@zju.edu.cn)

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