Sc2O3 single layer and Sc2O3/SiO2 coatings were prepared by electron beam evaporation. The surface and the microstructure of the film were characterized by AFM and X-ray diffraction, respectively. The laser-induced damage threshold and laser conditioning effect at 355 nm were investigated. The results show that the Sc2O3 film has wide optical band-gap and cubic phase structure. The laser-induced damage resistance of Sc2O3/SiO2 coatings is limited by the impurity of the source materials.