The valve inside a piezoelectric pump was easy to be failure when it was suffered too much stress concentration. A cymbal-shape slotted check valve was proposed to reduce the stress concentration of the piezoelectric pump. A valve-based piezoelectric pump was designed by using the cymbal-shape slotted check valve， and the working principle of the cymbal-shape slotted check valve based piezoelectric pump was introduced. The stress of the cymbal-shape slotted diaphragm was analyzed， the output performance of the piezoelectric pump was discussed and the stress of diaphragm on fluid-solid coupled interaction was calculated. Then， a prototype for the pump was fabricated. The finite element model of the cymbal-shape slotted check valve based piezoelectric pump was established and the stress of the cymbal-shaped slotted diaphragm on fluid-solid coupled interaction were calculated numerically. The calculation results indicate that the calculated value of the diaphragm is the maximum when the driving frequency is 418 Hz， and it is 81.74 MPa in the normal driving frequency range of the piezoelectric pump. Finally， the performance of the piezoelectric pump was tested， and results show that the maximum output flow of the pump and the maximum amplitude of the oscillator are in the low frequency band. The maximum flow rate is 6.6 g/min driving by 160 V (5 Hz)， and the maximum amplitude of the piezoelectric vibrator is 165.8 μm (160 V， 4 Hz). The experimental results validate the feasibility of the cymbal-shaped slotted valve based piezoelectric pump. Moreover， it concludes that the stress of the diaphragm working in high frequencies is larger than that working in low frequencies.