Chinese Optics Letters, Volume. 4, Issue 3, 03170(2006)
DC discharge characteristics and fluorine atom yield in NF3/He
DC discharge characteristics of NF3/He have been investigated experimentally under different experimental conditions, for example, different electrode materials, separations, flow rates of the gas NF3 or He, and series resistances. The optimum discharge parameters and the fluorine atom yield from the DC discharge of NF3/He as function of load power are studied experimentally.
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Liping Duo, Shukai Tang, Haijun Yu, Jian Wang, Xiangde Min, Liucheng Li, Yuqi Jin, Bailing Yang, Fengting Sang. DC discharge characteristics and fluorine atom yield in NF3/He[J]. Chinese Optics Letters, 2006, 4(3): 03170
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