Photonic Sensors, Volume. 7, Issue 2, 171(2017)
Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model
A rigid conformal (RC) lap can smooth mid-spatial-frequency (MSF) errors, which are naturally smaller than the tool size, while still removing large-scale errors in a short time. However, the RC-lap smoothing efficiency performance is poorer than expected, and existing smoothing models cannot explicitly specify the methods to improve this efficiency. We presented an explicit time-dependent smoothing evaluation model that contained specific smoothing parameters directly derived from the parametric smoothing model and the Preston equation. Based on the time-dependent model, we proposed a strategy to improve the RC-lap smoothing efficiency, which incorporated the theoretical model, tool optimization, and efficiency limit determination. Two sets of smoothing experiments were performed to demonstrate the smoothing efficiency achieved using the time-dependent smoothing model. A high, theory-like tool influence function and a limiting tool speed of 300 RPM were obtained.
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Chi SONG, Xuejun ZHANG, Xin ZHANG, Haifei HU, Xuefeng ZENG. Improving Smoothing Efficiency of Rigid Conformal Polishing Tool Using Time-Dependent Smoothing Evaluation Model[J]. Photonic Sensors, 2017, 7(2): 171
Category: Regular
Received: Nov. 3, 2016
Accepted: Jan. 10, 2017
Published Online: May. 9, 2017
The Author Email: SONG Chi (songchi7787@126.com)