Optics and Precision Engineering, Volume. 20, Issue 8, 1811(2012)
Fabrication of 3D metal micro-structure based on fs laser cutting and micro electric resistance slip welding
On the basis of femtosecond laser cutting and micro electric resistance slip welding,a forming process named Micro Double-staged Laminated Object Manufacturing(Micro-DLOM) was proposed to fabricate a complex 3D micro-structure,and the feasibility of the forming process was demonstrated by fabrication of a complex 3D micro-cavity mold. Firstly, 0Cr18Ni9 stainless steel foils with the thickness of 10 μm were cut by a femtosecond laser to get a 2D microstructure under a femtosecond laser power of 110 mW,a cutting speed of 0.1 mm/s and the cutting compensation quantity of 0.75 μm. Then, the influence of laser power, cutting speed on cutting precision was analysed,and the foils were welded together to get the 3D microstructure.For further study, the weld-zone was analysed by X-ray Diffractometry(XRD) and it was found that the phase of weld zone has not been changed but the content of phase changed. Compared with UV-LIGA,the Micro-DLOM can fabricate the 3D micro-structure with a free-form surface and the unrestricted ratio of depth to width. Moreover,the thinner the stainless steel foils the, the higher the processing accuracy is. Compared with femtosecond laser ablation,the Micro-DLOM only needs to cut every layer’s outline and has a higher forming efficiency. Compared with micro-EDM,the 3D micro-structure fabricated by Micro-DLOM has a large surface roughness, but it needs not fabricate different microelectrode faces and can fabricate the 3D micro-structure with unrestricted ratio of depth to width.
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XU Bin, WU Xiao-yu, LING Shi-quan, WU Shi-yun, LUO Feng, DU Chen-lin, SUN Xiu-quan. Fabrication of 3D metal micro-structure based on fs laser cutting and micro electric resistance slip welding[J]. Optics and Precision Engineering, 2012, 20(8): 1811
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Received: Apr. 11, 2012
Accepted: --
Published Online: Sep. 4, 2012
The Author Email: Bin XU (xubin_szu@163.com)