Optics and Precision Engineering, Volume. 20, Issue 6, 1310(2012)

Mechanical-electrochemical micro-etching under laser shock effect

ZHANG Zhao-yang*... LI Zhong-yang, WANG Yao-min and MAO Wei-ping |Show fewer author(s)
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    An aluminum alloy workpiece was etched by a compound processing of laser and electrochemistry in an experimental system established, and the influence of mechanic effect caused by a laser shock and an electrochemical effect on the process quality was investigated .The results show that when a high-energy pulsed laser irradiates on the metal workpiece in the solution, it will take the elastic deformation by the jet impact and the shock wave force caused by the laser. Under the stress of the laser shock wave,the potential electrode is changed, current density is increased, and the electrochemical corrosion of metallic materials is accelerated. Moreover, the mechanics effect of laser shock could remove the passivation layer on the workpiece surface irradiated by the laser, and the material at this zone is eroded and removed. However, the other zone material could not be corroded with the protection of the passivation layer, which enhances the locally etching ability of electrochemical machining significantly. Finally, the compound machining of the laser shock and electrochemical corrosion was used to achieve a micro-etching with a high aspect ratio and a line width of 140 μm in the NaNO3 solution with a concentration of 0.5 mol/L, which obtains good processing quality and satisfactory shaping precision.

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    ZHANG Zhao-yang, LI Zhong-yang, WANG Yao-min, MAO Wei-ping. Mechanical-electrochemical micro-etching under laser shock effect[J]. Optics and Precision Engineering, 2012, 20(6): 1310

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    Paper Information

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    Received: Nov. 24, 2011

    Accepted: --

    Published Online: Jun. 25, 2012

    The Author Email: Zhao-yang ZHANG (zzhaoyang@126.com)

    DOI:10.3788/ope.20122006.1310

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