Acta Optica Sinica, Volume. 31, Issue 12, 1205003(2011)
Analysis of Two-Dimensional Pinhole Vector Diffraction in Visible Light
The modern optical systems have placed stringent requirements on the manufactures and measurements of optical elements. Measurement accuracy of nanometer is needed. Phase-shift point diffraction interferometer is a common instrument in high-accuracy measurement, whose reference wave is generated by a pinhole with diameter of several hundred nanometers. So the measurement accuracy can be estimated by analyzing the diffracted reference wave. A two-dimensional simulation, based on finite element method (FEM), is set up to study the propagation of the visible light of 632.8 nm wavelength, through sub-1000 nm diameter pinholes in a chromium membrane with different thicknesses. Beam spot alignment error and tilt are also analyzed.
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Xu Jiajun, Xing Tingwen. Analysis of Two-Dimensional Pinhole Vector Diffraction in Visible Light[J]. Acta Optica Sinica, 2011, 31(12): 1205003
Category: Diffraction and Gratings
Received: Jul. 12, 2011
Accepted: --
Published Online: Oct. 31, 2011
The Author Email: Jiajun Xu (frog_0123@hotmail.com)