Acta Optica Sinica, Volume. 18, Issue 12, 1697(1998)
Study on Drift of Nonlinearity in Nanometer Precision Heterodyne Interferometers
Study on nonlinearity of differential heterodyne interferometer indicates that nonlinearity of heterodyne interferometer drifts with thermal modulation. This drift of nonlinearity is of particular importance in nanometer measurement. Theoretical analysis shows that the ratardation error and orientation error of the wave plate are the main reason, its influence is in the first order. These conclusions fit well with the experiment results.
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[in Chinese], [in Chinese], [in Chinese]. Study on Drift of Nonlinearity in Nanometer Precision Heterodyne Interferometers[J]. Acta Optica Sinica, 1998, 18(12): 1697