Chinese Optics Letters, Volume. 11, Issue s1, S10601(2013)

Characterization of multilayers and their interlayers: applicationto Co-based systems

P. Jonnard, Z.-S. Wang, J.-T. Zhu, C. Meny, J.-M. Andre, M.-H. Hu, and K. Le Guen

We use complementary analysis techniques to determine the structure of nanometric periodic multilayers and particularly their interfaces. We focus on Co-based multilayer which can be used as efficient optical component in the extreme ultraviolet (EUV) range. The samples are characterized using reflectivity measurements in order to determine the thickness and roughness of the various layers, X-ray emission and nuclear magnetic resonance (NMR) spectroscopies to identify the chemical state of the atoms present within the stack and know if they interdiffuse. Results are validated through the use of destructive techniques such as transmission electron microscopy or secondary ion mass spectrometry.

Tools

Get Citation

Copy Citation Text

P. Jonnard, Z.-S. Wang, J.-T. Zhu, C. Meny, J.-M. Andre, M.-H. Hu, K. Le Guen. Characterization of multilayers and their interlayers: applicationto Co-based systems[J]. Chinese Optics Letters, 2013, 11(s1): S10601

Download Citation

EndNote(RIS)BibTexPlain Text
Save article for my favorites
Paper Information

Category: Duv/euv coatings

Received: Dec. 2, 2012

Accepted: Jan. 5, 2013

Published Online: May. 30, 2013

The Author Email:

DOI:10.3788/col201311.s10601

Topics